✦ LIBER ✦
Selective etching of n-type silicon in pn junction structure in hydrofluoric acid and its application in silicon nanowire fabrication
✍ Scribed by Wang, Huiquan; Jin, Zhonghe; Zheng, Yangming; Ma, Huilian; Li, Tie; Wang, Yuelin
- Book ID
- 121410120
- Publisher
- Institute of Physics
- Year
- 2008
- Tongue
- English
- Weight
- 380 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0957-4484
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