✦ LIBER ✦
Selective etching and photoetching of {100} gallium arsenide in CrO3-HF aqueous solutions: I. Influence of composition on etching behaviour
✍ Scribed by J. Weyher; J. Van De Ven
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 963 KB
- Volume
- 63
- Category
- Article
- ISSN
- 0022-0248
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