Selective electroplating of copper lines on pre-patterned tantalum oxide thin films

✍ Scribed by H. El-Sayed; M.T. Greiner; P. Kruse

• Book ID: 108060281
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 773 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.05.014