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Selective dry etching of manganite thin films for high sensitive magnetoresistive sensors

✍ Scribed by M. Naoe; K. Hamaya; N. Fujiwara; T. Taniyama; Y. Kitamoto; Y. Yamazaki

Book ID: 114224757
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 154 KB
Volume: 235
Category: Article
ISSN: 0304-8853
DOI: 10.1016/s0304-8853(01)00342-0

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