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Selective Deposition of Ultrathin Poly(p-xylene) Films on Dielectrics Versus Copper Surfaces

✍ Scribed by J.J. Senkevich; C.J. Wiegand; G.-R. Yang; T.-M. Lu


Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
257 KB
Volume
10
Category
Article
ISSN
0948-1907

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