Selective deposition of amorphous germanium on Si with respect to SiO2 by organometallic CVD

✍ Scribed by J. Prokop; R. Merica; F. Glatz; S. Veprek; F.-R. Klingan; W.A. Herrmann

• Book ID: 115991056
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 216 KB
• Volume: 198-200
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(96)00027-0