Selective CVD of germanium on silicon and its applications : A. Kohlhase, M.-L. Cheng, S. Kobayashi, J. Murota and N. Mikoshiba. Vacuum42(4), 269 (1991)

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 250 KB
• Volume: 31
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(91)90160-9