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Selective crystallization of amorphous silicon thin film by a CW green laser

✍ Scribed by Seong Jin Park; Yu Mi Ku; Eun Hyun Kim; Jin Jang; Ki Hyung Kim; Chae Ok Kim


Book ID
116668941
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
629 KB
Volume
352
Category
Article
ISSN
0022-3093

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The effect of laser fluence on the crystallization of amorphous silicon irradiated by a frequency-doubled Nd:YAG laser is studied both theoretically and experimentally. An effective numerical model is set up to predict the melting threshold and the optimized laser fluence for the crystallization of