✦ LIBER ✦
Selective Chemical Vapor Deposition of Manganese Self-Aligned Capping Layer for Cu Interconnections in Microelectronics
✍ Scribed by Au, Yeung; Lin, Youbo; Kim, Hoon; Beh, Eugene; Liu, Yiqun; Gordon, Roy G.
- Book ID
- 118022644
- Publisher
- The Electrochemical Society
- Year
- 2010
- Tongue
- English
- Weight
- 648 KB
- Volume
- 157
- Category
- Article
- ISSN
- 0013-4651
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