✦ LIBER ✦
Selective area deposition of a-C:H films as masks for anisotropic etching of crystalline silicon in aqueous potassium hydroxide
✍ Scribed by Alfeu Fissore; Marco AR Alves; Edmundo da Silva Braga; Lucila Cescato
- Book ID
- 108390379
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 276 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0042-207X
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