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Selection of glass, anodic bonding conditions and material compatibility for silicon-glass capacitive sensors

✍ Scribed by T. Rogers; J. Kowal

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 798 KB
Volume: 46
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(94)00872-f

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