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Segregation of gallium at SiO2/Si interfaces during sputtering with Ga+ ions: experimental and computer simulation study

✍ Scribed by V Ignatova; I Chakarov; A Torrisi; A Licciardello


Book ID
108417610
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
139 KB
Volume
187
Category
Article
ISSN
0169-4332

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