Seed layer corrosion of Damascene structures in copper sulfate electrolytes

✍ Scribed by Nicholas M. Martyak; Pierre Ricou

• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 587 KB
• Volume: 6
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2003.09.002