✦ LIBER ✦

Sealing lip for radial shaft seals

Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 237 KB
Volume: 2000
Category: Article
ISSN: 1350-4789
DOI: 10.1016/s1350-4789(00)88826-1

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✦ Synopsis

I, lOmy Torr) and thereby an efficient sealing of a chamber measuring at least 48 x 48 inches. The seal must work in a harsh environment -high temperature, high voltage and high contact pressure. Seals used include elastomer types such as Viton. This O-ring is recessed into a machined groove within the target used in the deposition apparatus. This process consumes the target and so it has to be routinely replaced and remachined.

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