Sealed-cavity resonant microbeam pressur
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D.W. Burns; J.D. Zook; R.D. Horning; W.R. Herb; H. Guckel
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Article
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1995
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Elsevier Science
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English
โ 900 KB
A quasi-digital pressure sensor based on polysilicon resonant microbeams has been demonstrated. Pressure sensitivities of nearly 4000 counts per second per psi have been attained on a \(10 \mathrm{psi}\) device with a base frequency of \(233000 \mathrm{~Hz}\). Shortterm stability as low as \(0.01 \m