✦ LIBER ✦

Seal structure for deposition apparatus

Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 113 KB
Volume: 2000
Category: Article
ISSN: 1350-4789
DOI: 10.1016/s1350-4789(00)88825-x

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✦ Synopsis

I, lOmy Torr) and thereby an efficient sealing of a chamber measuring at least 48 x 48 inches. The seal must work in a harsh environment -high

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