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This patent is concerned with seals for a rotating table (2) used in vacuum applications. The rotating table is mounted with a predetermined gap (Db) to the stationary component (4). O-rings (20, 21) are fitted in seal grooves (15, 16). When vacuum is applied the seals are sucked into contact with the fixed (12) and rotating (11) surfaces. When a pos-itive pressure is applied the seals are rearranged in the grooves. The groove ( 15) has an inclined portion (15b), so that the seals are prevented from being caught between the rotating table and the fixed base. Vacuum is not fed into the communication passage while the table is being rotated.
๐ SIMILAR VOLUMES
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