✦ LIBER ✦

Seal for a glow plug

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 125 KB
Volume: 2009
Category: Article
ISSN: 1350-4789
DOI: 10.1016/s1350-4789(09)70039-x

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✦ Synopsis

This patent refers to equipment used in the manufacture of flat panel displays. As these are manufactured in larger sizes the sealing of the doors to the vacuum chambers required in the process presents a challenge. Apparatuses and methods are provided for sealing a slit valve passage. After the two components of the slit door are closed together the sealing force may be adjusted by varying the gas pressure to the seal depending on pressure conditions in the process chambers.

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