Nanolayer CrNx/WNy coatings used on micr
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S.H. Yao; Y.L. Su; W.H. Kao; K.W. Cheng; C.T. Su
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Article
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2010
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Elsevier Science
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English
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A series of CrNx/WNy nanolayer coatings were synthesized using an industrial-scale four-target DC closed-field unbalanced magnetron sputtering ion plating system (CFUBMSIPS TM ), employing one W target and three Cr targets. For comparison, a monolayer CrN coating was also grown on the same depositio