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Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS

✍ Scribed by Akiyama, T.; Collard, D.; Fujita, H.

Book ID: 120646669
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 286 KB
Volume: 6
Category: Article
ISSN: 1057-7157
DOI: 10.1109/84.557525

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