Schottky diode analysis for evaluation of RIE effects on silicon surfaces : P. Spirito, C. M. Ransom and G. S. Oehrlein. Solid-St. Electron.29, 607 (1986)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 132 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90567-1