✦ LIBER ✦
Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing
✍ Scribed by Seong Jin Yim; Doo Yong Lee
- Book ID
- 110269784
- Publisher
- Springer US
- Year
- 1999
- Tongue
- English
- Weight
- 131 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0956-5515
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