Scattering by layered structures with rough surfaces: comparison of polarimetric optical scatterometer measurements with theory

✍ Scribed by Bahar, Ezekiel ;Kubik, Robert D.

• Book ID: 115345976
• Publisher: The Optical Society
• Year: 1997
• Tongue: English
• Weight: 463 KB
• Volume: 36
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.36.002956