✦ LIBER ✦
Scanning μ-RBS characterisation of local loading effects of non-selectively epitaxially grown SiGe thin films
✍ Scribed by Thomas Winzell; Johan Pejnefors; Mikael Elfman; Mikael Östling; Harry J Whitlow
- Book ID
- 114164632
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 102 KB
- Volume
- 179
- Category
- Article
- ISSN
- 0168-583X
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