✦ LIBER ✦
Scanning probe sharp tip formation for IC integration using mesa technique
✍ Scribed by P.B. Grabiec; Feng Shi; P. Hudek; T. Gotszalk; M. Zaborowski; P. Dumania; I.W. Rangelow
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 394 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0167-9317
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