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Scanning probe microscope simulator for the assessment of noise in scanning probe microscopy controllers

✍ Scribed by Wutscher, T.; Niebauer, J.; Giessibl, F. J.

Book ID
120899200
Publisher
American Institute of Physics
Year
2013
Tongue
English
Weight
881 KB
Volume
84
Category
Article
ISSN
0034-6748

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Scanners for scanning probe microscopy (SPM) are generally built of piezos, which are used to move the sample with respect to the tip in the x-, y-or z-direction or vice versa. Piezoelectric scanners are usually height calibrated by the manufacturer with laser interferometry, with a calibration grid