Scanning-force-microscope test system for device internal test with high spatial and temporal resolution

✍ Scribed by Christoph Böhm; Christoph Roths; Erich Kubalek

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 758 KB
• Volume: 24
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(94)90058-2