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Scaling potential of pin-type 3-D SBT ferroelectric capacitors integrated in 0.18 μm CMOS technology

✍ Scribed by L. Goux; D. Maes; J.G. Lisoni; H. Vander Meeren; V. Paraschiv; L. Haspeslagh; C. Artoni; G. Russo; R. Zambrano; D.J. Wouters


Book ID
108207651
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
281 KB
Volume
83
Category
Article
ISSN
0167-9317

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