Scaling potential and MOSFET integration of thermally stable Gd silicate dielectrics

✍ Scribed by H.D.B. Gottlob; M. Schmidt; A. Stefani; M.C. Lemme; H. Kurz; I.Z. Mitrovic; W.M. Davey; S. Hall; M. Werner; P.R. Chalker; K. Cherkaoui; P.K. Hurley; J. Piscator; O. Engström; S.B. Newcomb

• Book ID: 104052336
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 372 KB
• Volume: 86
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.03.084