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Scale-up of pulsed laser deposition (PLD) for 4″-wafer coating

✍ Scribed by M. Panzner; R. Dietsch; Th. Holz; H. Mai; S. Völlmar

Book ID: 103619043
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 549 KB
Volume: 96-98
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(95)00536-6

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