✦ LIBER ✦
Scale dependence of tensile strength of micromachined polysilicon MEMS structures due to microstructural and dimensional constraints
✍ Scribed by Jianning Ding; Yonggang Meng; Shizhu Wen
- Book ID
- 105728341
- Publisher
- Springer
- Year
- 2001
- Tongue
- English
- Weight
- 1019 KB
- Volume
- 46
- Category
- Article
- ISSN
- 1001-6538
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