✦ LIBER ✦
Scalable multichannel micromachining with pseudo-nondiffracting vacuum ultraviolet beam arrays generated by thin-film axicons
✍ Scribed by Grunwald, Ruediger; Neumann, Uwe; Rosenfeld, Arkadi; Li, Jianzhao; Herman, Peter R.
- Book ID
- 115428586
- Publisher
- Optical Society of America
- Year
- 2006
- Tongue
- English
- Weight
- 262 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0146-9592
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