Scalability of dry-etch processing for small unit-cell HgCdTe focal-plane arrays

✍ Scribed by E. P. G. Smith; G. M. Venzor; P. M. Goetz; J. B. Varesi; L. T. Pham; E. A. Patten; W. A. Radford; S. M. Johnson; A. J. Stoltz; J. D. Bensen; J. H. Dinan

• Book ID: 107452954
• Publisher: Springer US
• Year: 2003
• Tongue: English
• Weight: 554 KB
• Volume: 32
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-003-0077-3