✦ LIBER ✦
SAW-based gas sensors with rf sputtered InOx and PECVD SiNx films: Response to H2 and O3 gases
✍ Scribed by A.C. Fechete; W. Wlodarski; K. Kalantar-Zadeh; A.S. Holland; J. Antoszewski; S. Kaciulis; L. Pandolfi
- Book ID
- 108263670
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 255 KB
- Volume
- 118
- Category
- Article
- ISSN
- 0925-4005
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