✦ LIBER ✦
SATPOLY: a self-aligned tungsten on polysilicon process for CMOS VLSI applications
✍ Scribed by Wong, M.; Saraswat, K.C.
- Book ID
- 114535841
- Publisher
- IEEE
- Year
- 1989
- Tongue
- English
- Weight
- 716 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0018-9383
- DOI
- 10.1109/16.30941
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