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[Saratov State Tech. Univ Fifth International Conference on Actual Problems of Electron Devices Engineering (APEDE'2002) - Saratova, Russia (18-19 Sept. 2002)] Fifth International Conference on Actual Problems of Electron Devices Engineering - Light-stimulated ionic etching of semiconductor heterostructures

✍ Scribed by Serdobintsev, A.A.; Karasev, S.A.; Rokakh, A.G.; Stetsura, S.V.; Zhukov, A.G.

Book ID: 126670588
Publisher: Saratov State Tech. Univ
Year: 2002
Weight: 158 KB
Category: Article
ISBN-13: 9785743310654
DOI: 10.1109/APEDE.2002.1044937

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