Sampling modulation technique in radio-frequency helium glow discharge emission source by use of pulsed laser ablation

On-line determination of sputtered depth

On-line determination of sputtered depth in a radio frequency glow discharge atomic emission source by laser confocal displacement

✍ Hartenstein, Matthew L.; Marcus, R. Kenneth 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 178 KB 👁 1 views

A new method of sputtered depth determination was evaluated for glow discharge (GD) analysis of solid samples. Although sputter analysis methods like GD may characterize samples in terms of both composition and spatial (depth) distribution of those components, quantitative analysis may suffer signif