✦ LIBER ✦
Safety aspects of oil sealed rotary vane vacuum pumps in CVD applications : P. Bachmann and H. P. Berges. Solid St. Technol., 83 (July 1986)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 129 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.