S-Gun™ source offers full spectrum thin film sputtering

• Publisher: Elsevier Science
• Year: 1977
• Tongue: English
• Weight: 807 KB
• Volume: 27
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(77)80644-1

✦ Synopsis

Vacuum News

Combivac IT 20 automatic ionisation vacuum gauge. The Combivac IT 20 is an automatic control and analogue read-out gauge that can span, with great accuracy, the entire pressure range of a vacuum plant. Covering in all 10 orders of magnitude, the 2 analogue meters read from 10-8 mbar to 10-2 mbar, and 10-3 mbar to 1000 mbar. The sensing unit is a Bayard-Alpert ionisation gauge head with non-burn-out iridium cathode, with a total power requirement of only 3 W. The large effective range is automatically switched, and there is provision for remote-control output. For automatic process control there is a Torrostat S 20 plug-in unit, with two switching settings.