Round-robin test of the carbon in LEC SI GaAs

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 364 KB
• Volume: 8
• Category: Article
• ISSN: 0961-1290
• DOI: 10.1016/0961-1290(95)80107-3

✦ Synopsis

Carbon concentration in semi-insulating GaAs crystals is a significant parameter which determines the resistivity, one of the most essential properties of GaAs. Consequently, the precise measurement of the carbon concentration is a key technique for the manufacturing of GaAs crystals in good reproducibility.