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Roughness of amorphous/crystalline interface in pre-amorphization implantation: Molecular dynamic simulation and modeling

✍ Scribed by Min Yu; Rong Wang; Huihui Ji; Ru Huang; Xing Zhang; Yangyuan Wang; Jinyu Zhang; Hideki Oka

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 157 KB
Volume: 81
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.05.003

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