✦ LIBER ✦
Roughening mechanisms of tensily strained Si1−x−yGexCy films grown by UHV-CVD: evidence of a carbon surface diffusion related mechanism
✍ Scribed by Cyril Calmes; Daniel Bouchier; Catherine Clerc; Yulin Zheng
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 322 KB
- Volume
- 224
- Category
- Article
- ISSN
- 0169-4332
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