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“Rotating” steps in Si(0 0 1) homoepitaxy

✍ Scribed by S.N Filimonov; B Voigtländer


Book ID
108278812
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
339 KB
Volume
549
Category
Article
ISSN
0039-6028

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We report on the formation of different arrays of pyramid-like Si nanostructures at the onset of silicon homoepitaxial growth. Such nano-objects are observed to reproducibly develop in Si films grown by molecular beam epitaxy on HF-treated Si(0 0 1) substrates, for a narrow set of growth conditions.