Pyramid-like nanostructures created by S
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N. Galiana; P.P. Martin; C. Munuera; M. Varela; C. Ocal; M. Alonso; A. Ruiz
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Article
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2009
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Elsevier Science
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English
⚖ 457 KB
We report on the formation of different arrays of pyramid-like Si nanostructures at the onset of silicon homoepitaxial growth. Such nano-objects are observed to reproducibly develop in Si films grown by molecular beam epitaxy on HF-treated Si(0 0 1) substrates, for a narrow set of growth conditions.