✦ LIBER ✦
Rotating dust ring in an RF discharge coupled with a dc-magnetron sputter source. Experiment and simulation
✍ Scribed by Matyash, K; Fröhlich, M; Kersten, H; Thieme, G; Schneider, R; Hannemann, M; Hippler, R
- Book ID
- 120302371
- Publisher
- Institute of Physics
- Year
- 2004
- Tongue
- English
- Weight
- 389 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0022-3727
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