✦ LIBER ✦
Room temperature oxidation enhancement of porous Si(001) using ultraviolet–ozone exposure
✍ Scribed by Thompson, W. Howard; Yamani, Zain; Abu Hassan, Laila H.; Greene, J. E.; Nayfeh, Munir; Hasan, M.‐A.
- Book ID
- 118030283
- Publisher
- American Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 362 KB
- Volume
- 80
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.362728
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