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Room-temperature growth of Cu thin films by nozzle-type partially ionized beam deposition with various acceleration voltages

✍ Scribed by S.K. Koh; Y.S. Yoon; K.H. Kim; H.J. Jung; J.Y. Lee


Book ID
107864842
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
537 KB
Volume
278
Category
Article
ISSN
0040-6090

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