✦ LIBER ✦
Room Temperature Deposition Process for Manufacturing Silicon Nitride Films Using Pulsed Plasma and Neural Network
✍ Scribed by Kim, Daehyun; Kim, Byungwhan; Han, Dongil; Yoon, Neung Goo
- Book ID
- 118064679
- Publisher
- Taylor and Francis Group
- Year
- 2011
- Tongue
- English
- Weight
- 882 KB
- Volume
- 26
- Category
- Article
- ISSN
- 1042-6914
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