Effect of bias voltage on Diamond-like c
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Zeng Lin; Shao-Bo Lv; Zhao-Ji Yu; Ming Li; Tie-Yuan Lin; De-Chun Ba; Chi-Kyu Cho
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Article
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2008
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Elsevier Science
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English
β 482 KB
Bilayered films composed of Diamond-like carbon (DLC) and silicon (Si) were prepared on the surface of polymethylmethacrylate (PMMA) substrates using plasma enhanced chemical vapor deposition (PECVD) and magnetron sputtering deposition. The deposited films were investigated by means of Atomic force