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Roll-to-roll UV imprint lithography for flexible electronics

โœ Scribed by P. Maury; D. Turkenburg; N. Stroeks; P. Giesen; I. Barbu; E. Meinders; A. van Bremen; N. Iosad; R. van der Werf; H. Onvlee


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
819 KB
Volume
88
Category
Article
ISSN
0167-9317

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The dimensional stability of poly(ethylene naphthalene-2,6-dicarboxylate) (PEN) foils during the handling and production process, is crucial for the quality of the final multilayer flexible electronic devices. The foil-on-carrier (FOC) -foil/adhesive/Si-wafer sandwich -is a handling method, which is