✦ LIBER ✦
Role of volatile liquids in debris and hole taper angle reduction during femtosecond laser drilling of silicon
✍ Scribed by L. S. Jiao; E. Y. K. Ng; L. M. Wee; H. Y. Zheng
- Publisher
- Springer
- Year
- 2011
- Tongue
- English
- Weight
- 516 KB
- Volume
- 104
- Category
- Article
- ISSN
- 1432-0630
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